scoutNANO – Fully Automated Nanoparticle & Total Metals
scoutNANO is a fully automated system for the complete elemental analysis of both nanoparticles and total metals – metal and non-metal – in semiconductor chemicals.
Nanoparticle and Total Metals Online Analyzer
- Multi-element determination of nanoparticle size and quantity
- Multi-element determination of total metals
- Autocalibration of nanoparticles and total metals
- Analyzes all semiconductor grade chemicals
- Up to 40 sampling points
- Up to and greater than 300 m in any direction
Ease of Use
- Simultaneously determine nanoparticle and total metals data
- Flexible reporting options including SECS/GEM
Long Term Stability
- Nano process module for calibration standard stability
- Proven total metals reliability
Integrated ICPMS
- <5 nm nanoparticle detection
- Sub-ppt total metals detection
scoutNANO Workflow Diagram
Example diagram for remote monitoring of incoming/outgoing chemicals and process chemicals using scoutNANO.
scoutNANO