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prepFAST Ultrapure Chemicals Systems

prepFAST PPQ – Automated PPQ Metals Determination

The prepFAST PPQ utilizes syringe-driven flows of UPW, semiconductor grade acids, and standard solution to automate both sample dilutions and standard curve generation. It eliminates manual handling of samples to deliver sub-ppt detection limit capabilities in direct analysis mode and sub-ppq detection limit capabilities in concentration mode.

Automation

  • Automatic external and MSA calibrations
  • Automated sample sensing
    • Accounts for viscosity and automatically adjusts timing
    • Detects and injects the sample and triggers the ICPMS
  • Automated syringe-driven sample introduction
    • Sample loading
    • Sample preparation
    • Inline dilution
    • Acid addition (direct mode only)

Ultraclean

  • Ultraclean sample preparation
  • Integrated ultraclean sample environment
    • Includes ultraclean air shower
    • Options include:
      • ULPA (Ultrapure air) filter
      • Sample racks for PFA containers (<1 mL to 500 mL)
  • Continuously-flowing high purity UPW rinse (user-supplied UPW)
  • UPW polishing columns for low background

prepFAST PPQ Features Diagram

prepFAST PPQ Features Diagram

Direct Analysis Mode

  • Capability to analyze all semiconductor grade chemicals
  • PPT/Sub-PPT detection limits for all semiconductor elements
  • General purpose for any sample matrix
  • Automated MSA calibration
  • Automated inline dilution

Concentration Mode

  • Sub-PPQ detection limits for analysis of UPW, 30% H2O2 and IPA
  • Analyzes metals while removing difficult matrices such as IPA
  • Reduced impact of ICPMS interferences and background on results
  • Improved sensitivity
  • Automatic MSA calibration

Autocalibration in Direct Analysis Mode

Autocalibration in Direct Analysis Mode

Autocalibration in Concentration Mode

Autocalibration in Concentration Mode

Product Brochure

prepFAST PPQ Brochure
 

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