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Scout Semiconductor Online Monitoring Systems

scoutNANO – Fully Automated Nanoparticle & Total Metals

scoutNANO is a fully automated system for the complete elemental analysis of both nanoparticles and total metals – metal and non-metal – in semiconductor chemicals.

Nanoparticle and Total Metals Online Analyzer

  • Multi-element determination of nanoparticle size and quantity
  • Multi-element determination of total metals
  • Autocalibration of nanoparticles and total metals
  • Analyzes all semiconductor grade chemicals
    • Up to 40 sampling points
    • Up to and greater than 300 m in any direction

Ease of Use

  • Simultaneously determine nanoparticle and total metals data
  • Flexible reporting options including SECS/GEM

Long Term Stability

  • Nano process module for calibration standard stability
  • Proven total metals reliability

Integrated ICPMS

  • <5 nm nanoparticle detection
  • Sub-ppt total metals detection

scoutNANO Workflow Diagram

Example diagram for remote monitoring of incoming/outgoing chemicals and process chemicals using scoutNANO.

scoutNANO Workflow Diagram

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