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prepFAST Ultrapure Chemicals Systems

prepFAST S – Automated Introduction of Pure Semiconductor Chemicals

The prepFAST S has revolutionized the way ultrapure semiconductor grade chemicals are analyzed with ICPMS detection. The prepFAST S utilizes syringe-driven flows of UPW, semiconductor grade acids, and standard solution to automate both sample dilutions and standard curve generation. It eliminates manual handling of samples and standards to deliver sub-ppt detection limit capabilities.

Automated Inline Sample Dilution

  • Removes interaction with dangerous chemical during manual dilution process
  • Removes contamination event from pouring sample into a new bottle for dilution
  • Improves dilution reproducibility

Automated Inline Standard Preparation

  • Removes contamination when creating MSA calibrations
  • Improve throughput by quickly calibrating the ICPMS for each chemical – down to single digit-ppt range

Syringe Driven Sample Injection

  • Consistent injection flowrate compared to self-aspiration
  • High speed washing of ICPMS spray chamber greatly reduces time to switch chemicals

Fluoronetic Autosampler

  • Magnetically coupled fluoropolymer linear drive eliminates exposed metal surfaces inside the enclosure
  • All fluoropolymer autosampler rail reduces contamination
  • Compatible with large range of bottle sizes (<1 mL - >500 mL)

Fully Enclosed Environment

  • Provides clean room grade results without the clean room
  • Removes hazardous fumes from room
  • Continuous flow of ultra-pure water (UPW) for maximum purity

Unmatched Nanoparticle Detection


  • Improve Sample Homogenization:
    • Homogenizes sample to improve accuracy and reproducibility of nanoparticle analysis
    • Mobilizes nanoparticles back into solution
  • Optimize Nanoparticle Suspension:
    • Chilled environment for optimal suspension of nanoparticles
    • Automatically homogenizes reference material solution before each analysis
  • Eliminate Nanoparticle Deterioration:
    • Automatically adds reference material at time of analysis
    • Eliminates nanoparticle deterioration in chemicals
prepFAST S NANO Unmatched Nanoparticle Detection

prepFAST S Features Diagram

prepFAST S Features Diagram

High Purity Automation with Sub-PPT results


  • Automatic external and MSA calibrations
  • Automated sample sensing
    • accounts for viscosity and automatically adjusts timing
    • detects and injects the sample and triggers the ICPMS
  • Automated syringe-driven sample introduction
    • Sample loading
    • Sample preparation
    • Inline dilution
    • Acid addition


  • Ultraclean sample preparation
  • Integrated ultraclean sample environment
  • Includes ultraclean fluoronetic autosampler and air shower (options include):
    • ULPA (Ultrapure air) filter
    • Sample racks for PFA containers (<1 mL to 500 mL)
  • Continuously-flowing high purity UPW rinse (user-supplied UPW)
  • UPW polishing columns for low background

PPT/Sub-PPT Results

  • Capability to analyze all semiconductor grade chemicals
  • PPT/PPQ detection limits for all semiconductor elements

prepFAST S Inline Dilution of Semiconductor-grade Chemicals

The prepFAST S allows dilution by volume or weight for all semiconductor-grade chemicals. Metals are quantified using automated inline MSA or external calibration. Automated direct analysis of concentrated chemicals eliminates sample contamination caused by manual dilution into a secondary container.

Inline Dilution of Semiconductor-grade Chemicals

prepFAST S Autocalibration


Fluoronetic Autosampler Video

Fluoronetic Autosampler Video

Contact us for information on our prepFAST S Systems!

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