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prepFAST Ultrapure Chemicals Systems

prepFAST SE – Benchtop System for Ultrapure Chemicals

The prepFAST SE has revolutionized the way ultrapure semiconductor grade chemicals are analyzed with ICPMS detection. The prepFAST SE utilizes syringe-driven flows of UPW, semiconductor grade acids, and standard solution to automate standard curve generation. It is an economical option for eliminating manual handling of samples to deliver sub-ppt detection limit capabilities.

Fluoronetic Autosampler

  • All fluoropolymer autosampler rails reduce contamination
  • Compatible with large range of bottle sizes (<1 mL - >500 mL)
  • Available in MicroDX and 2DX models

Automated Inline Standard Preparation

  • Removes contamination when creating MSA calibrations
  • Improve throughput by quickly calibrating the ICPMS for each chemical with no user – down to single digit-ppt range

Syringe Driven Sample Injection

  • Consistent injection flowrate compared to self-aspiration
  • High speed washing of ICPMS spray chamber greatly reduces time to switch chemicals

Fully Enclosed Environment

  • Provides clean room grade results without the clean room
  • Removes hazardous fumes from room
prepFAST SE Video

prepFAST SE In Action

prepFAST SE (2DX) Features Diagram

prepFAST SE Features Diagram

A UPW Intake Manifold and Compact UPW Valve may be added with an additional leak sensor for a direct UPW connection instead of using bottle fed UPW.

High Purity Automation with Sub-PPT results


  • Automatic external and MSA calibrations
  • Automated syringe-driven sample introduction
    • Sample loading

PPT/Sub-PPT Results

  • PPT/PPQ detection limits for semiconductor elements
  • Ideal for samples that can be run neat
    • Ex: UPW, IPA & 31% H2O2


  • Ultraclean sample preparation
  • Integrated ultraclean sample environment
  • Includes ultraclean fluoronetic autosampler (options include):
    • Air shower
    • ULPA (Ultrapure air) filter
    • Sample racks for PFA containers (<1 mL to 500 mL)
    • Continuously-flowing high purity UPW rinse (user-supplied UPW)

prepFAST SE Autocalibration


FluoroWand Accessory

FluoroWand Features Diagram
FluoroWand Features Diagram
FluoroWand In Action
FluoroWand In Action

FluoroWand is an accessory for the prepFAST SE (2DX model) ultrapure chemical sampling system which permits racked sample containers to remain individually covered except at the moment when the sample is being taken up for analysis. FluoroWand preserves sample integrity for demanding ICPMS analyses of small volume or chemically reactive samples where high precision and ultralow detection limits are required.

Contact us for information on our prepFAST SE Systems!

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