About ESI   |   Contact Us   |   Locations   |   Careers
Elemental Scientific - Innovative Leaders in Semiconductor Online Monitoring, Laboratory Automation, Laser Ablation, Glassware & Nebulization

Scout Semiconductor Online Monitoring Systems

scoutGX – Fully Automated Online Process Gas Monitoring

scoutGX is a fully automated system for the online monitoring of metallic and nanoparticle contaminants in ultrapure non-toxic semicondutor process gases.

Real-time Monitoring

  • Automated process gas monitoring
  • Immediate detection and notification of contamination
  • Up to 16 process gas connections
  • Monitors CO2, N2, O2, Ar, He, Ne and others

Inline Gas Exchanger

  • Eliminates manual sampling
  • Eliminates chemical hazards associated with traditional trapping techniques
  • Lowers detection limits
  • Detects metallic and nanoparticle contamination

Ease of Use

  • Simultaneously determine nanoparticle and total metals data
  • Autocalibration
    • ppt to sub-ppt concentrations
    • sensitive and precise nanoparticle measurement
  • Flexible reporting options including SECS/GEM

scoutGX Workflow Diagram

scoutGX Workflow Diagram

Example diagram for direct monitoring of semiconductor process gases using scoutGX.

Inline Gas Exchanger Diagram

Inline Gas Exchanger Diagram

Sample gas is exchanged with argon and contaminants are transported to the ICPMS.

Contact us for information on scoutGX Gas Monitoring Systems!

Contact Us