Automated Analysis for Ultrapure Semiconductor Grade Chemicals
Eliminate manual handling of samples to deliver the lowest possible detection limits with increased operator safety.
Complete Automation of Ultrapure Semiconductor Chemicals
- Introduction of pure semiconductor chemicals
- Automated sample sensing
- Automated syringe-driven sample introduction
- Ultraclean sample preparation
- PPT/PPQ detection limits for all semiconductor elements
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Benchtop System for Ultrapure Semiconductor Chemicals
- Automatically create calibration curves - External or MSA
- Calibrate to single digit ppt - From single 1 ppb stock standard
- Integrated chemically-resistant Fluoronetic Autosampler
- Configurable with many PFA sample containers
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Automated PPQ Metals Determination
- Matrix removal & preconcentration
- PPQ detection limits for analysis of UPW, 30% H2O2 and IPA
- PPT/PPQ detection limits for all semiconductor elements
- Automated MSA calibration
- Automated inline dilution
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Determination of Organic Contaminants
- Introduction of pure semiconductor chemicals
- Automated calibration: matrix-matched or standard addition
- Automated inline dilution
- Ultra-high mass resolution
- Includes TOF-MS or QTOF-MS
- Easy-to-use software with built in dynamic library
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