Advances in semiconductor technology and decreasing tolerances in microchip design require simultaneous improvements in both chemical purity and fabrication. Demand for lower detection limits requires new approaches to sample handling and trace elemental analysis – within the fab and throughout the supply chain. ESI has been at the forefront of improving analytical performance for semiconductor materials since the company was first founded. The prepFAST S line of sample handling systems has revolutionized automated trace elemental analysis of ultra-pure chemicals, allowing ever-lower detection limits to be achieved, and increasing operator safety through reduced handling of hazardous materials.
Featured Applications
Products & Systems
Automated introduction of ultrapure semiconductor chemicals for ICPMS analysis
Benchtop system for automated sample introduction of ultrapure chemicals
Automated inline preconcentration and matrix removal for the lowest possible detection limits in semiconductor chemicals
Determination of organic contaminants
Continuous operation in an aggressively chemical environment
Ideal choice for routine sample digestion
Generate ultrapure acids from inexpensive reagent acids
Protect samples from all external sources of contamination during evaporation
Makes handling very safe & decreases operating cost as they can be can be used many times
Allows individual washing of containers of various shapes and sizes
Decontamination and conditioning by acid steam condensation