scoutCARBON – Fully Automated Organic Contaminants
scoutCARBON is a fully automated system for real-time monitoring of organic impurities in semiconductor chemicals. scoutCARBON not only detects and identifies contaminants, it also quantifies and charts each contaminant.
Organic Contaminant Online Analyzer
- Quantitative analysis of targeted organic contaminants in inorganic and organic chemicals
- Identification and semi-quantification of non-targeted compounds
- A single central analyzer monitors:
- Up to 40 sampling points
- Up to and greater than 300m in any direction
- Online monitoring of IPA, H2SO4, H2O, HF, H2O2, NH4OH, stripper, resist and other process chemicals
Mass Spectrometric Detection
- Ultra-high mass resolution: (±0.0001)
- Positive and negative ion modes
- 50-20,000 amu
Ease of Use
- Flexible data reporting options including SECS/GEM
- Automatic calibration
scoutCARBON Workflow Diagram
Example diagram for remote monitoring of incoming/outgoing chemicals and process chemicals using scoutCARBON.
scoutCARBON