scoutGX – Fully Automated Online Process Gas Monitoring
scoutGX is a fully automated system for the online monitoring of metallic and nanoparticle contaminants in ultrapure non-toxic semicondutor process gases.
Real-time Monitoring
- Automated process gas monitoring
- Immediate detection and notification of contamination
- Up to 16 process gas connections
- Monitors CO2, N2, O2, Ar, He, Ne and others
Inline Gas Exchanger
- Eliminates manual sampling
- Eliminates chemical hazards associated with traditional trapping techniques
- Lowers detection limits
- Detects metallic and nanoparticle contamination
Ease of Use
- Simultaneously determine nanoparticle and total metals data
- Autocalibration
- ppt to sub-ppt concentrations
- sensitive and precise nanoparticle measurement
- Flexible reporting options including SECS/GEM
scoutGX Workflow Diagram
![scoutGX Workflow Diagram scoutGX Workflow Diagram](/assets/img/products/online-monitoring/scoutgx/scoutGX-diagram.webp)
Example diagram for direct monitoring of semiconductor process gases using scoutGX.
Inline Gas Exchanger Diagram
![Inline Gas Exchanger Diagram Inline Gas Exchanger Diagram](/assets/img/products/online-monitoring/scoutgx/scoutGX-diagram1.webp)
Sample gas is exchanged with argon and contaminants are transported to the ICPMS.
![scoutGX scoutGX](/assets/img/products/online-monitoring/scoutgx/scoutGX.webp)
scoutGX