scoutHSN – Silicon in Hot Phosphoric Baths
The scoutHSN is an online monitoring system that allows fully automated unattended measurement of ppm level free silicon and simultaneous monitoring of bound silicon. A single scoutHSN is capable of monitoring free and bound silicon in hot phosphoric baths.
Real-time Automated Monitoring
- Fully automated collection and analysis of hot H3PO4
- 24/7 monitoring of High Selectivity Nitride etchant in hot H3PO4 baths
- Automated calibration
High Accuracy
- Precise measurement for trace amount of specific Si and total Si at the same time
- Simultaneous monitoring of non-silicon elements
- Tight process control independent of chemistry changes
Advanced Analysis Options
- Interlaced sampling for more frequent results
- Many communication protocols including SECS/GEM and Modbus
scoutHSN Workflow Diagram
scoutHSN
scoutHSN Remote