prepFAST CARBON – Determination of Organic Contaminants
The prepFAST CARBON has revolutionized the way ultrapure semiconductor grade chemicals are analyzed for organic contamination with TOF-MS/QTOF-MS detection. The prepFAST CARBON utilizes syringe-driven flows of UPW, semiconductor chemicals, and multiple standard solutions to automate both sample dilutions and standard curve generation. It eliminates manual handling of samples to deliver ppb/ppt detection limit capabilities.
Organic Contaminant Analyzer
- Quantitative analysis of targeted organic contaminants in inorganic and organic chemicals
- Identification and semi-quantification of non-targeted compounds
- Analysis of IPA, H2SO4, H2O, HF, H2O2, NH4OH, stripper, resist and other process chemicals
- TOF-MS and QTOF-MS detector options
Ease of Use
- Flexible data reporting options
- Automatic calibration and dilution
- Capability to select from multiple standard solutions
- Easy-to-use software with built-in dynamic library option
- prepFAST CARBON laboratory system complements scoutCARBON online system
Mass Spectrometric Detection
- Ultra-high mass resolution: (±0.0001)
- Positive and negative ion modes
- 50-20,000 amu
prepFAST CARBON