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Ultrapure Semiconductor Chemicals Analysis

SGTX – Automated PPT/PPQ Metals and Nanoparticle Analysis in Semiconductor Chemicals

SGTX - Automated PPT/PPQ Metals and Nanoparticle Analysis in Semiconductor Chemicals

SGTX with Autobench

Uncapping & Tightly Recapping Samples. Integrated Barcode-reading for Sample Tracking.

SGTX represents the next generation of semiconductor chemical analysis, helping laboratories meet the most stringent ultra-low detection limits in semiconductor chemicals. Compatible with multiple analytical instruments, including ICPMS, QTOF-MS, GC-MS, and IC-MS.

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Automated Uncapping, Vortex Mixing & Barcode Reading

  • Ultrapure Analysis: Safeguard sample integrity with automatic bottle uncapping

    • Reduce risk of contamination and evaporation

  • Nanoparticle Analysis: Homogenize samples through automated vortex mixing

    • Mobilize nanoparticles from vessel walls into solution

  • Multi-instrument Sample Tracking: Track samples across multiple instruments (ICPMS, GC-MS, QTOF-MS, IC-MS)

    • Certify compliance with a complete audit trail

  • Ultrapure PFA Vessels with Laser-etched Barcodes:

    • Easy-to-clean and non-contaminating

Ultrapure Semiconductor Chemical Analysis

  • Autocalibration and autodilution for sub-ppt/ppq metals and nanoparticle detection

  • Direct analysis of concentrated chemicals without pre-dilution

  • Acid-inert and metal-free components

SGTX - Automated PPT/PPQ Metals and Nanoparticle Analysis in Semiconductor Chemicals

SGTX

TRAXLink - Innovative Multifunctional Automation Module

  • Hands-free Automation:

    • Bottles are automatically placed into TRAXLink for processing

    • Scans sample barcodes prior to analysis

      • Unbarcoded bottles can still be sampled

    • Uncaps bottles for automated sampling

    • Recaps samples and places in original rack position

  • Improved Lab Safety:

    • Reduces manual handling of dangerous chemicals

    • Minimizes acid fumes and prevents vapor-phased reactions

  • Metal-free, Acid Inert Material:

    • Capped samples minimize contamination for critical elements, including B & Si

    • Improved data quality and reproducibility for semiconductor chemicals

Watch SGTX Video with TRAXLink

SGTX Features Diagram

SGTX Features Diagram

Instrument Compatibility

Bring the benefits of SGTX to any lab technique or instrument!

  • Interfaces to multiple analytical techniques:
    • ICPMS (SGTX & SGTX PPQ)
    • QTOF-MS (SGTX CARBON)
    • IC-MS (SGTX IC)
    • GC-MS (SGTX GC)
  • Compatible with trace metals, non-polar/volatile organics, nanoparticles, and ionic species (inorganic and small organic anions & cations)

SGTX Instrument Compatibility

Nanoparticle Analysis

SGTX features automated vortex mixing (TRAXSpin) to ensure stable and consistent sample homogenization and nanoparticle mobilization prior to analysis. This process mobilizes nanoparticles from vessel walls into solution, ensuring consistent, reproducible results.

Nanoparticle reference material is automatically stabilized and homogenized, ensuring long- term, consistent results. Automatic, inline reference material spiking determines the size and concentration of nanoparticles in samples.

The data here demonstrates detection of gold nanoparticles in a 200-ppt standard solution, with agitation performed every 30 minutes over a 48-hour period. The SGTX-agitated sample displayed improved consistency in nanoparticle analysis compared to non-agitated samples, demonstrating the benefits of the automated platform.

Automatic Agitation of 197Au Nanoparticles in 200 ppt Standard Solution

Automatic Agitation of 197Au Nanoparticles in 200 ppt Standard Solution

Comparison of Ultrapure Bottles Analysis

SGTX integrates TRAXLink, a fully automated, metal-free bottle uncapping module that prevents environmental contamination and evaporation associated with open-vessel sampling. The system automatically uncaps each bottle for sampling and immediately recaps it as the sample is analyzed, maintaining sample integrity.

This data illustrates ICPMS-measured contamination levels of common environmental contaminants (boron and silicon) in samples left uncapped, compared to those stored in SGTX-managed vessels. These results demonstrate the automated uncapping and recapping protocol effectively mitigates contamination that would otherwise be unavoidable in samples left open to the laboratory environment.

Boron - Automated Bottle Uncapping/Recapping

Silicon - Automated Bottle Uncapping/Recapping

Legend for Automated Bottle Uncapping/Recapping

SGTX Resources

SGTX Flyer

SGTX Flyer

Automated PPT/PPQ Metals and Nanoparticle Analysis in Semiconductor Chemicals

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Watch SGTX Video

Watch SGTX Video with TRAXLink

SGTX automatically vortex mixes, barcode reads, uncaps, and samples ultrapure semiconductor chemicals.

Watch SGTX Video with TRAXLink

Watch SGTX Video

View SGTX Features Diagram

SGTX’s key features automate sub-ppt/ppq and nanoparticles analysis in semiconductor chemicals.

View SGTX Features Diagram

Bring the benefits of SGTX to any lab technique or instrument!

  Autocalibration PPT Metals PPQ Metals Nanoparticles Organics Anions/Cations
SGTX ✓ ✓   ✓    
SGTX PPQ ✓ ✓ ✓ ✓    
SGTX CARBON ✓       ✓  
SGTX IC ✓         ✓
SGTX GC ✓       ✓  

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